He, J. Q., Teren, A., Jia, C. L., Erhart, P., Urban, K., Waser, R., & Wang, R. H. (2004). Microstructure and interfaces of HfO2 thin films grown on silicon substrates. Amsterdam [u.a.]: Elsevier.
Chicago Style CitationHe, J. Q., A. Teren, C. L. Jia, P. Erhart, K. Urban, R. Waser, andfavorite R. H. Wang. Microstructure and Interfaces of HfO2 Thin Films Grown On Silicon Substrates. Amsterdam [u.a.]: Elsevier, 2004.
MLA CitationHe, J. Q., et al. Microstructure and Interfaces of HfO2 Thin Films Grown On Silicon Substrates. Amsterdam [u.a.]: Elsevier, 2004.
Warning: These citations may not always be 100% accurate.