This title appears in the Scientific Report :
1999
Stress and plasticity in passivated interconnect lines
Stress and plasticity in passivated interconnect lines
Saved in:
Personal Name(s): | Nielen, H. |
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Goebel, H. / Eppler, I. / Schroeder, H. / Schilling, W. | |
Contributing Institute: |
Institut für Festkörperforschung; IFF |
Published in: |
Proceedings of the 5th International Workshop on 'Stress -Induced Phenomena in Metallization', Stuttgart, Germany. - 1999. - (AIP Conference proceedings ; 491). - S. 277 |
Imprint: |
1999
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Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Festkörperforschung für die Informationstechnik |
Publikationsportal JuSER |
Description not available. |