This title appears in the Scientific Report :
2002
Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application
Integration of piezoelectric PZT thin films with internal electrodes into an actuator structure for MEMS application
Saved in:
Personal Name(s): | Hoffmann, M. |
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Leuerer, T. / Liedtke, R. / Böttger, U. / Mokwa, W. / Waser, R. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: | Integrated ferroelectrics, 50 (2002) S. 21 - 32 |
Imprint: |
London [u.a.]
Taylor & Francis
2002
|
Physical Description: |
21 - 32 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Integrated Ferroelectrics
50 |
Publikationsportal JuSER |
Description not available. |