This title appears in the Scientific Report :
2003
New thin film technologies
New thin film technologies
Saved in:
Personal Name(s): | Ehrhart, P. |
---|---|
Waser, R. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM |
Published in: |
Handbook of Advanced Ceramics / ed. S. Somiya ... - Elsevier, 2003. - 0-12-654640-1 |
Imprint: |
2003
|
ISBN: |
0-12-654640-1 |
Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |