This title appears in the Scientific Report :
2003
Please use the identifier:
http://dx.doi.org/10.1063/1.1590431 in citations.
Please use the identifier: http://hdl.handle.net/2128/1240 in citations.
Surface treatment effects on the thickness dependence of the remanent polarization of PbZr0.52Ti0.48O3 capacitors
Surface treatment effects on the thickness dependence of the remanent polarization of PbZr0.52Ti0.48O3 capacitors
In this letter, we report on the thickness dependence of the remanent polarization of Pt/PbZr0.52Ti0.48O3/SrRuO3 capacitors. Two different patterning techniques were used to fabricate the capacitors. For lift-off processed capacitors, the remanent polarization decreased with decreasing thickness. Io...
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Personal Name(s): | Rodriguez Contreras, J. |
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Kohlstedt, H. / Poppe, U. / Waser, R. / Buchal, Ch. | |
Contributing Institute: |
Elektrokeramische Materialien; IFF-EKM Mikrostrukturforschung; IFF-IMF Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: | Applied physics letters, 83 (2003) S. 126 |
Imprint: |
Melville, NY
American Institute of Physics
2003
|
Physical Description: |
126 |
DOI: |
10.1063/1.1590431 |
Document Type: |
Journal Article |
Research Program: |
Kondensierte Materie Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Applied Physics Letters
83 |
Subject (ZB): | |
Link: |
Get full text OpenAccess |
Publikationsportal JuSER |
Please use the identifier: http://hdl.handle.net/2128/1240 in citations.
In this letter, we report on the thickness dependence of the remanent polarization of Pt/PbZr0.52Ti0.48O3/SrRuO3 capacitors. Two different patterning techniques were used to fabricate the capacitors. For lift-off processed capacitors, the remanent polarization decreased with decreasing thickness. Ion-beam-etched capacitors, however, showed a constant remanent polarization for all PbZr0.52Ti0.48O3 film thicknesses down to 23 nm. Remarkably, this constant remanent polarization for ion-beam-etched capacitors corresponds to the spontaneous polarization expected for a stress-free bulk PbZr0.52Ti0.48O3 crystal. (C) 2003 American Institute of Physics. |