This title appears in the Scientific Report :
1999
New high-precision 5-Axis RBS/channeling goniometer for ion beam analysis of 150 mm wafers
New high-precision 5-Axis RBS/channeling goniometer for ion beam analysis of 150 mm wafers
Saved in:
Personal Name(s): | Holländer, B. |
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Heer, H. / Wagener, M. / Halling, H. / Mantl, S. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: |
Ion beam analysis accelerators in applied research and technology : 14th International Conference on Ion Beam Analysis / 6th European Conference on Accelerators in Applied Research and Technology |
Imprint: |
1999
|
Conference: | Dresden 1999-07-26 00:00:00 |
Document Type: |
Poster |
Research Program: |
Ionentechnik |
Publikationsportal JuSER |
Description not available. |