This title appears in the Scientific Report :
1999
RBS and TEM analysis of CVD grown Si/SiGe superlattices, HFET- and RTD device structures
RBS and TEM analysis of CVD grown Si/SiGe superlattices, HFET- and RTD device structures
Saved in:
Personal Name(s): | Holländer, B. |
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Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: |
Esprit MEL-ARI Meeting |
Imprint: |
1999
|
Conference: | Marseille 1999-02-25 00:00:00 |
Document Type: |
Talk (non-conference) |
Research Program: |
Ionentechnik |
Publikationsportal JuSER |
Description not available. |