This title appears in the Scientific Report :
1999
Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication
Nanopatterning of epitaxial CoSi2 and its use for Nano-MOSFET fabrication
Saved in:
Personal Name(s): | Mantl, S. |
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Zhao, Q. T. / Kappius, L. / Mesters, S. / Kabius, B. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: |
Physics, chemistry and application of nanostructures : Nanomeeting '99 |
Imprint: |
1999
|
Conference: | Minsk 1999-05-17 00:00:00 |
Document Type: |
Talk (non-conference) |
Research Program: |
Ionentechnik |
Publikationsportal JuSER |
Description not available. |