This title appears in the Scientific Report :
1999
Improvement of the surface quality of InP wafers using TOF-SIMS as characterization
Improvement of the surface quality of InP wafers using TOF-SIMS as characterization
Saved in:
Personal Name(s): | Thomas, N. |
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Jacob, G. / Hardtdegen, H. H. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: |
10th International Conference on Indium Phosphide and Related Materials : Ibaraki, Japan, 11.-15.5.1998. - Tokio, 1999. - 0-7803-4220-8. - S. 96 |
Imprint: |
1999
|
Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Halbleiterschichtsysteme und Mesoskopische Strukturen |
Publikationsportal JuSER |
Description not available. |