This title appears in the Scientific Report :
1999
Nanometer patterning of epitaxial CoSi2/Si(100) by local oxidation
Nanometer patterning of epitaxial CoSi2/Si(100) by local oxidation
Saved in:
Personal Name(s): | Zhao, Q. T. |
---|---|
Dolle, M. / Kappius, L. / Klinkhammer, F. / Mesters, S. / Mantl, S. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: | Solid state electronics, 43 (1999) S. 1091 |
Imprint: |
Oxford [u.a.]
Pergamon, Elsevier Science
1999
|
Physical Description: |
1091 |
Document Type: |
Journal Article |
Research Program: |
Ionentechnik |
Series Title: |
Solid-State Electronics
43 |
Publikationsportal JuSER |
Description not available. |