This title appears in the Scientific Report :
1999
Growth, patterning and microelectronic applications of epitaxial cobaltdisilicide
Growth, patterning and microelectronic applications of epitaxial cobaltdisilicide
Saved in:
Personal Name(s): | Mantl, S. |
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Kappius, L. / Antons, A. / Löken, M. / Klinkhammer, F. / Dolle, M. / Zhao, Q. T. / Mesters, S. / Buchal, C. / Bay, H. L. / Kabius, B. / Trinkaus, H. / Heinig, H. | |
Contributing Institute: |
Institut für Festkörperforschung; IFF Institut für Schicht- und Ionentechnik; ISI |
Published in: |
Amorphous and Microcrystalline Silicon Technology : Symposium |
Imprint: |
1999
|
Conference: | San Francisco, CA 1999-04-14 00:00:00 |
Document Type: |
Talk (non-conference) |
Research Program: |
Festkörperforschung für die Informationstechnik |
Publikationsportal JuSER |
Description not available. |