This title appears in the Scientific Report :
2003
Quantitative TEM analysis of structural defects in helium implanted silicon
Quantitative TEM analysis of structural defects in helium implanted silicon
Saved in:
Personal Name(s): | Hueging, N. |
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Tillmann, R. G. E. / Luysberg, M. / Trinkaus, H. / Urban, K. | |
Contributing Institute: |
Mikrostrukturforschung; IFF-IMF |
Published in: |
XIIIth International Conference on Semiconducting Materials |
Imprint: |
2003
|
Conference: | Cambridge, United Kingdom 2003-03-31 |
Document Type: |
Conference Presentation |
Research Program: |
Kondensierte Materie |
Publikationsportal JuSER |
Description not available. |