This title appears in the Scientific Report :
2004
Please use the identifier:
http://dx.doi.org/10.1016/j.sna.2004.03.067 in citations.
Thin transparent pin-photodiodes for length measurements
Thin transparent pin-photodiodes for length measurements
We present new interferometers for length measurements based on sampling an optical standing wave. The interference of two laser beams propagating in opposite direction results in a sinusoidal light intensity profile. Thin transparent pin-photodiodes based on amorphous silicon and deposited on a gla...
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Personal Name(s): | Bunte, E. |
---|---|
Mandryka, V. / Jun, J. H. / Büchner, H.-J. / Jäger, G. / Stiebig, H. | |
Contributing Institute: |
Institut für Photovoltaik; IPV |
Published in: |
Sensors and actuators |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2004
|
Physical Description: |
334 - 337 |
DOI: |
10.1016/j.sna.2004.03.067 |
Document Type: |
Journal Article |
Research Program: |
Photovoltaik |
Series Title: |
Sensors and Actuators A
113 |
Subject (ZB): | |
Publikationsportal JuSER |
We present new interferometers for length measurements based on sampling an optical standing wave. The interference of two laser beams propagating in opposite direction results in a sinusoidal light intensity profile. Thin transparent pin-photodiodes based on amorphous silicon and deposited on a glass substrate enable the detection of this intensity profile. Introducing the detectors into the standing wave, photocurrents according to the intensity profile at the spatial position of the absorber layer can be measured. Two individual detectors positioned on the optical axis with a defined phase allow bi-directional fringe counting. Additionally, the two pin-photodiodes were integrated in one detector system. The measurement of Lissajous figures demonstrate the potential of the concepts for length measurements. (C) 2004 Elsevier B.V. All rights reserved. |