This title appears in the Scientific Report :
2004
Please use the identifier:
http://dx.doi.org/10.1007/s00339-004-2811-y in citations.
Fabrication of stress-induced SrRuO3 nanostructures by pulsed laser deposition
Fabrication of stress-induced SrRuO3 nanostructures by pulsed laser deposition
The compressive stress originated in the coherent epitaxial-SrRuO3/LaAlO3 interface has been used as a nano-patterning tool for the creation of island and wire arrays in ultrathin (<20 nm) SrRuO3 films. The nanostructure, stoichiometry, and electrical properties of these arrays have been studied...
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Personal Name(s): | Vasco, E. |
---|---|
Dittmann, R. / Karthäuser, S. / Waser, R. | |
Contributing Institute: |
Elektronische Materialien; IFF-IEM Center of Nanoelectronic Systems for Information Technology; CNI |
Published in: | Applied physics / A, 79 (2004) S. 1461 |
Imprint: |
Berlin
Springer
2004
|
Physical Description: |
1461 |
DOI: |
10.1007/s00339-004-2811-y |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Applied Physics A
79 |
Subject (ZB): | |
Publikationsportal JuSER |
The compressive stress originated in the coherent epitaxial-SrRuO3/LaAlO3 interface has been used as a nano-patterning tool for the creation of island and wire arrays in ultrathin (<20 nm) SrRuO3 films. The nanostructure, stoichiometry, and electrical properties of these arrays have been studied by X-ray diffraction, atomic force microscopy, Rutherford back-scattering spectroscopy and resistivity vs temperature measurements. The influence of the shadowing effect produced by the non-perpendicular incidence of the evaporated particles on the array morphology is discussed. |