This title appears in the Scientific Report :
2001
Please use the identifier:
http://dx.doi.org/10.1007/s11664-001-0190-0 in citations.
On the suitability of getter purified hydrogen for the LP-MOVPE of (AlGa)As : a comparison to Pd-diffused hydrogen
On the suitability of getter purified hydrogen for the LP-MOVPE of (AlGa)As : a comparison to Pd-diffused hydrogen
This paper presents a comparative study of the optical properties of (AlGa)As grown by LP-MOVPE using hydrogen purified by the conventional method, the Pd-cell, and getter-purified hydrogen. The electrical characteristics could not be determined. The free carrier concentration in the 1.3 mum thick l...
Saved in:
Personal Name(s): | Hardtdegen, H. |
---|---|
Schmidt, R. / Wirtz, K. / Mück, A. / Guadagnuolo, S. / Vergani, G. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 Institut für Photovoltaik; IPV |
Published in: | Journal of electronic materials, 30 (2001) S. 1397 |
Imprint: |
Warrendale, Pa
TMS
2001
|
Physical Description: |
1397 |
DOI: |
10.1007/s11664-001-0190-0 |
Document Type: |
Journal Article |
Research Program: |
Halbleiterschichtsysteme und Mesoskopische Strukturen |
Series Title: |
Journal of Electronic Materials
30 |
Subject (ZB): | |
Publikationsportal JuSER |
This paper presents a comparative study of the optical properties of (AlGa)As grown by LP-MOVPE using hydrogen purified by the conventional method, the Pd-cell, and getter-purified hydrogen. The electrical characteristics could not be determined. The free carrier concentration in the 1.3 mum thick layers must therefore be lower than 10(15)cm(-3), so that the layer thickness did not exceed the depletion layer thickness. The optical characteristics of the layers depend similarly on the variation of growth parameters and are comparable and state of the art for both purification techniques. The suitability of getter purification for hydrogen as the carrier gas in MOVPE is therefore demonstrated. |