This title appears in the Scientific Report :
2001
Please use the identifier:
http://dx.doi.org/10.1016/S0040-6090(01)01052-5 in citations.
Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Large area (320 x 400 mm(2)) glass/ZnO-films were prepared by high-rate d.c. magnetron sputtering from ceramic targets and compared to lab-type r.f.- and m.f.-sputtered ZnO. The very uniform and initially smooth films exhibit excellent electrical and optical properties (resistivity less than or equa...
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Personal Name(s): | Müller, J. |
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Schöpe, G. / Kluth, O. / Rech, B. / Ruske, M. / Trube, J. / Szyszka, B. / Jiang, X. / Bräuer, G. | |
Contributing Institute: |
Institut für Photovoltaik; IPV |
Published in: | Thin solid films, 392 (2001) S. 327 - 333 |
Imprint: |
Amsterdam [u.a.]
Elsevier
2001
|
Physical Description: |
327 - 333 |
DOI: |
10.1016/S0040-6090(01)01052-5 |
Document Type: |
Journal Article |
Research Program: |
Grundlagen und Technologie von Dünnschichtsolarzellen |
Series Title: |
Thin Solid Films
392 |
Subject (ZB): | |
Publikationsportal JuSER |
Large area (320 x 400 mm(2)) glass/ZnO-films were prepared by high-rate d.c. magnetron sputtering from ceramic targets and compared to lab-type r.f.- and m.f.-sputtered ZnO. The very uniform and initially smooth films exhibit excellent electrical and optical properties (resistivity less than or equal to 5 X 10(-4) Ohm cm, transmission > 80% for visible light and 1500-nm thick films). Upon etching in diluted hydrochloric acid they develop a surface texture. Independent of sputter technique (d.c. or r.f.) and substrate size, higher substrate temperatures and lower sputter gas pressures have a similar influence on the film structure and lead to more robust and etch-resistant films. Showing excellent light scattering properties, amorphous silicon pin solar cells prepared on these large area glass/ZnO samples exhibit initial efficiencies up to 9.2%, proving the viability of sputtered and texture-etched ZnO as TCO-substrate for industrial solar module production. (C) 2001 Elsevier Science B.V. All rights reserved. |