This title appears in the Scientific Report :
2001
Formation of shallow junctions in Si-nanostructures
Formation of shallow junctions in Si-nanostructures
Saved in:
Personal Name(s): | Hogg, S. M. |
---|---|
Rije, E. / Moers, J. / Trellenkamp, S. / Bay, H. L. / Lenk, S. / Mantl, S. | |
Contributing Institute: |
Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: |
Ion Beam Processing of Semiconductors Workshop |
Imprint: |
2001
|
Conference: | Erlangen 2001-09-10 |
Document Type: |
Talk (non-conference) |
Research Program: |
Ionentechnik |
Publikationsportal JuSER |
Description not available. |