This title appears in the Scientific Report :
2004
Towards self-aligned nano-structures by means of layer expansion technique
Towards self-aligned nano-structures by means of layer expansion technique
Saved in:
Personal Name(s): | Schöning, M. J. |
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Platen, J. / Knobbe, D.-T. / Poghossian, A. | |
Contributing Institute: |
Institut für Bio- und Chemosensoren; ISG-2 |
Published in: |
5th International Symposium on Electrochemical Micro- and Nano-Systems Technology |
Imprint: |
2004
|
Conference: | Tokyo, Japan 2004-09-29 |
Document Type: |
Conference Presentation |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Publikationsportal JuSER |
Description not available. |