This title appears in the Scientific Report :
2004
Please use the identifier:
http://dx.doi.org/10.1088/0953-8984/16/17/006 in citations.
Formation of Si/Ge Nanostructures at Surfaces by Self-organization
Formation of Si/Ge Nanostructures at Surfaces by Self-organization
The growth of kinetically self-organized 2D islands in Si/Si(111) epitaxy is described. The island size distribution for this system was measured using scanning tunnelling microscopy (STM). The influence of surface reconstructions on growth kinetics is studied directly using a method of simultaneous...
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Personal Name(s): | Voigtländer, B. |
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Kawamura, M. / Paul, N. / Cherepanov, V. | |
Contributing Institute: |
Institut für Grenzflächen und Vakuumtechnologien; ISG-3 |
Published in: | Journal of physics / Condensed matter, 16 (2004) S. s1535 - s1551 |
Imprint: |
Bristol
IOP Publ.
2004
|
Physical Description: |
s1535 - s1551 |
DOI: |
10.1088/0953-8984/16/17/006 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Journal of Physics: Condensed Matter
16 |
Subject (ZB): | |
Publikationsportal JuSER |
The growth of kinetically self-organized 2D islands in Si/Si(111) epitaxy is described. The island size distribution for this system was measured using scanning tunnelling microscopy (STM). The influence of surface reconstructions on growth kinetics is studied directly using a method of simultaneous deposition and STM scanning. For the case of growth of Si islands on Si(111), lateral growth of rows of the width of the 7 x 7 reconstruction unit cell at the edges of two-dimensional islands leads to the formation of 'magic' island sizes. The evolution of the size and shape of individual {105} faceted Ge islands (hut clusters) on Si(001) is measured during growth. A slower growth rate is observed when an island grows to larger sizes. This behaviour can be explained by kinetically self-limiting growth. The potential formation of thermodynamically stable strained islands of a specific size is discussed. The formation of 2D Si/Ge nanostructures at pre-existing defects is studied. The step flow growth mode is used to fabricate Si and Ge nanowires with a width of 3.5 nm and a thickness of one atomic layer (0.3 nm) by self-assembly. One atomic layer of Bi terminating the surface is used to distinguish between the elements Si and Ge. A difference in apparent height is measured in STM images for Si and Ge. Also different kinds of two-dimensional Si/Ge nanostructure such as alternating Si and Ge nanorings having a width of 5-10 nm were grown. |