This title appears in the Scientific Report :
2000
Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays
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Personal Name(s): | Faßbender, F. |
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Schmitt, G. / Schöning, M. J. / Lüth, H. / Buß, G. / Schultze, J. W. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: |
Sensors and actuators |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2000
|
Physical Description: |
128 |
Document Type: |
Journal Article |
Research Program: |
Halbleiterbauelemente und Analytik |
Series Title: |
Sensors and Actuators B
68 |
Publikationsportal JuSER |
Description not available. |