This title appears in the Scientific Report :
2005
He Implantation Induced Relaxation of SiGe/Si:Nucleation of Dislocations and Coarsening of He Bubbles
He Implantation Induced Relaxation of SiGe/Si:Nucleation of Dislocations and Coarsening of He Bubbles
Saved in:
Personal Name(s): | Luysberg, M. |
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Contributing Institute: |
Mikrostrukturforschung; IFF-IMF |
Published in: |
International SiGe Technology and Device Meeting Conference |
Imprint: |
2005
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Conference: | Frankfurt, Oder 2005-05-16 |
Document Type: |
Conference Presentation |
Research Program: |
Kondensierte Materie |
Publikationsportal JuSER |
Description not available. |