This title appears in the Scientific Report :
2009
Rare-earth based alternative gate dielectrics for future integration in MOSFETs
Rare-earth based alternative gate dielectrics for future integration in MOSFETs
Saved in:
Personal Name(s): | Lopes, J. M. J. |
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Durgun Özben, E. / Roeckerath, M. / Littmark, U. / Luptak, R. / Lenk, S. / Besmehn, A. / Breuer, U. / Schubert, J. / Mantl, S. | |
Contributing Institute: |
Halbleiter-Nanoelektronik; IBN-1 Zentralabteilung für Chemische Analysen; ZCH Institut für Bio- und Nanosysteme - Bioelektronik; IBN-2 JARA-FIT; JARA-FIT |
Published in: |
Proceedings of the 10th International Conference on Ultimate Integration of Silicon (ULIS), 18-20 März, Aachen, 2009, 99 - 102 ISBN 978-1-4244-3705-4 |
Imprint: |
2009
|
ISBN: |
9781424437054 |
Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
Description not available. |