This title appears in the Scientific Report :
2009
Liquid injection atomic layer deposition of lead zirconate titanate thin films for three dimensional ferroelectric capacitor structures
Liquid injection atomic layer deposition of lead zirconate titanate thin films for three dimensional ferroelectric capacitor structures
Saved in:
Personal Name(s): | Hoffmann-Eifert, S. |
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Watanabe, T. / Hwang, C.S. / Waser, R. | |
Contributing Institute: |
Elektronische Materialien; IFF-6 JARA-FIT; JARA-FIT |
Published in: |
DPG Frühjahrstagung 2009 |
Imprint: |
2009
|
Conference: | Dresden 2009-03-23 |
Document Type: |
Conference Presentation |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
Description not available. |