This title appears in the Scientific Report :
2005
Please use the identifier:
http://dx.doi.org/10.1016/j.snb.2004.12.029 in citations.
Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies
Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and ser...
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Personal Name(s): | Schöning, M. J. |
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Näther, N. / Auger, V. / Poghossian, A. / Koudelka-Hep, M. | |
Contributing Institute: |
Institut für Bio- und Chemosensoren; ISG-2 Center of Nanoelectronic Systems for Information Technology; CNI |
Published in: |
Sensors and actuators |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2005
|
Physical Description: |
986 - 992 |
DOI: |
10.1016/j.snb.2004.12.029 |
Document Type: |
Journal Article |
Research Program: |
Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |
Series Title: |
Sensors and Actuators B
108 |
Subject (ZB): | |
Publikationsportal JuSER |
Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte-insulator-semiconductor) structures have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200-2000 mu m and volumes of 0.3-5 mu l. The sensitive areas in the channels are ranging from 1.6 to 25 mm(2). For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage (C/V) and constant capacitance (ConCap) mode, respectively. (c) 2004 Elsevier B.V. All rights reserved. |