This title appears in the Scientific Report :
2005
Influences of Discharge Power an Total Gas Flow Rate in the High Rate Deposition of µc-Si:H Solar Cells by PECVD
Influences of Discharge Power an Total Gas Flow Rate in the High Rate Deposition of µc-Si:H Solar Cells by PECVD
Saved in:
Personal Name(s): | Mai, Y. |
---|---|
Klein, S. / Carius, R. / Repmann, T. / Geng, X. / Finger, F. | |
Contributing Institute: |
Institut für Photovoltaik; IPV |
Published in: |
15th International Photovoltaic Science and Engineerung Conference (PVSEC-15) |
Imprint: |
2005
|
Conference: | Shanghai, China 2005-10-10 |
Document Type: |
Conference Presentation |
Research Program: |
Photovoltaik |
Publikationsportal JuSER |
Description not available. |