This title appears in the Scientific Report :
2000
Integrated photometer with porous silicon interference filters
Integrated photometer with porous silicon interference filters
Porous silicon transmission interference filters with laterally varying transmission wavelengths are used to manufacture a photometer. Because of the linear varying transmission characteristic of the filter it is possible to measure, beyond small regions of the porous layer, the correlated spectral...
Saved in:
Personal Name(s): | Hunkel, D. |
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Marso, M. / Butz, R. / Arens-Fischer, R. / Lüth, H. | |
Contributing Institute: |
Institut für Schicht- und Ionentechnik; ISI |
Published in: | Materials science and engineering / B, 69-70 (2000) S. 100 |
Imprint: |
New York, NY [u.a.]
Elsevier
2000
|
Physical Description: |
100 |
Document Type: |
Journal Article |
Research Program: |
Halbleiterschichtsysteme und Mesoskopische Strukturen |
Series Title: |
Materials Science and Engineering B
69/70 |
Subject (ZB): | |
Publikationsportal JuSER |
Porous silicon transmission interference filters with laterally varying transmission wavelengths are used to manufacture a photometer. Because of the linear varying transmission characteristic of the filter it is possible to measure, beyond small regions of the porous layer, the correlated spectral photo current. It is therefore necessary to bring up a series of ohmic metal contacts along the porous filter. Between two neighbouring contacts one can measure the spectral photo current of the transmission wavelength at this specific point of the surface. By measuring multiple pairs of contacts, the whole spectrum between 400 and 1100 nm wavelength can be recorded. First results of the resolution capability and sensitivity are demonstrated. (C) 2000 Elsevier Science S.A. All rights reserved. |