This title appears in the Scientific Report :
2005
Structural properties of microcrystalline SiC deposited at low substrate temperatures by HWCVD
Structural properties of microcrystalline SiC deposited at low substrate temperatures by HWCVD
Saved in:
Personal Name(s): | Klein, S. |
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Houben, L. / Carius, R. / Finger, F. / Fischer, E. V. | |
Contributing Institute: |
Institut für Photovoltaik; IPV Werkstoffsynthese und Herstellungsverfahren; IWV-1 |
Published in: |
21st International Conference on Amorphous and Nanocrystalline Semiconductors (ICANS21) |
Imprint: |
2005
|
Conference: | Lisboa 2005-09-04 |
Document Type: |
Conference Presentation |
Research Program: |
Photovoltaik |
Publikationsportal JuSER |
Description not available. |