This title appears in the Scientific Report :
2006
Please use the identifier:
http://dx.doi.org/10.1017/S1431927606060326 in citations.
Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy Using Hardware Aberration Correction
Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy Using Hardware Aberration Correction
The design and construction of a double-hexapole aberration corrector has made it possible to build the prototype of a spherical-aberration corrected transmission electron microscope dedicated to high-resolution imaging on the atomic scale. The corrected instrument, a Philips CM200 FEG ST, has an in...
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Personal Name(s): | Lentzen, M. |
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Contributing Institute: |
Mikrostrukturforschung; IFF-IMF |
Published in: | Microscopy and microanalysis, 12 (2006) S. 191 - 205 |
Imprint: |
New York, NY
Cambridge University Press
2006
|
Physical Description: |
191 - 205 |
PubMed ID: |
17481356 |
DOI: |
10.1017/S1431927606060326 |
Document Type: |
Journal Article |
Research Program: |
Kondensierte Materie |
Series Title: |
Microscopy and Microanalysis
12 |
Subject (ZB): | |
Publikationsportal JuSER |
The design and construction of a double-hexapole aberration corrector has made it possible to build the prototype of a spherical-aberration corrected transmission electron microscope dedicated to high-resolution imaging on the atomic scale. The corrected instrument, a Philips CM200 FEG ST, has an information limit of better than 0.13 nm, and the spherical aberration can be varied within wide limits, even to negative values. The aberration measurement and the corrector control provide instrument alignments stable enough for materials science investigations. Analysis of the contrast transfer with the possibility of tunable spherical aberration has revealed new imaging modes: high-resolution amplitude contrast, extension of the point resolution to the information limit, and enhanced image intensity modulation for negative phase contrast. In particular, through the combination of small negative spherical aberration and small overfocus, the latter mode provides the high-resolution imaging of weakly scattering atom columns, such as oxygen, in the vicinity of strongly scattering atom columns. This article reviews further lens aberration theory, the principle of aberration correction through multipole lenses, aspects for practical work, and materials science applications. |