This title appears in the Scientific Report :
2006
Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique
Study of Relaxation of Strain in Patterned Structures using X-Ray Diffraction Technique
Saved in:
Personal Name(s): | Khan, A. R. |
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Stangl, J. / Bauer, G. / Buca, D. / Holländer, B. / Trinkaus, H. / Mantl, S. / Loo, R. / Caymax, M. | |
Contributing Institute: |
Center of Nanoelectronic Systems for Information Technology; CNI Theorie III; IFF-TH-III Institut für Halbleiterschichten und Bauelemente; ISG-1 |
Published in: |
Conference Digest of the Third International Silicon Germanium Technology and Devices Meeting, 15 May - 17 May 2006, Princeton, USA. - 2006. - (IEEE Conference Paper). - S. 116 |
Imprint: |
2006
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Document Type: |
Contribution to a book Contribution to a conference proceedings |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
Description not available. |