This title appears in the Scientific Report :
2007
Rare Earth based amorphous ternary oxide layers as alternative gate dielectrics
Rare Earth based amorphous ternary oxide layers as alternative gate dielectrics
Saved in:
Personal Name(s): | Schubert, J. |
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Contributing Institute: |
Center of Nanoelectronic Systems for Information Technology; CNI Halbleiter-Nanoelektronik; IBN-1 |
Published in: |
Frühjahrstagung der Deutschen Physikalischen Gesellschaft |
Imprint: |
2007
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Conference: | Regensburg, Deutschland 2007-03-26 |
Document Type: |
Conference Presentation |
Research Program: |
Grundlagen für zukünftige Informationstechnologien |
Publikationsportal JuSER |
Description not available. |