This title appears in the Scientific Report :
2007
The performance of thin-film silicon solar cells prepared after in-situ chamber plasma cleaning as example of chemical memory effect (CME) of PECVD reactor
The performance of thin-film silicon solar cells prepared after in-situ chamber plasma cleaning as example of chemical memory effect (CME) of PECVD reactor
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Personal Name(s): | Grunsky, D. |
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Schmitz, R. / Beyer, W. | |
Contributing Institute: |
Photovoltaik; IEF-5 |
Published in: |
9th Euregional Workshop on the Exploration of Low Temperature Plasma Physics |
Imprint: |
2007
|
Conference: | Kerkrade, Niederlande 2006-11-23 |
Document Type: |
Poster |
Research Program: |
Erneuerbare Energien |
Publikationsportal JuSER |
Description not available. |