This title appears in the Scientific Report :
2017
Please use the identifier:
http://dx.doi.org/10.1016/j.jnucmat.2017.09.021 in citations.
Angular and velocity distributions of tungsten sputtered by low energy argon ions
Angular and velocity distributions of tungsten sputtered by low energy argon ions
Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85–200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for molecular dynamics simulation of sputtering taking...
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Personal Name(s): | Marenkov, E. (Corresponding author) |
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Nordlund, K. / Sorokin, I. / Eksaeva, A. / Gutorov, K. / Jussila, J. / Granberg, F. / Borodin, D. | |
Contributing Institute: |
Plasmaphysik; IEK-4 |
Published in: | Journal of nuclear materials, 496 (2017) S. 18 - 23 |
Imprint: |
Amsterdam [u.a.]
Elsevier Science
2017
|
DOI: |
10.1016/j.jnucmat.2017.09.021 |
Document Type: |
Journal Article |
Research Program: |
Helmholtz Interdisciplinary Doctoral Training in Energy and Climate Research (HITEC) Plasma-Wall-Interaction |
Publikationsportal JuSER |
Sputtering by ions with low near-threshold energies is investigated. Experiments and simulations are conducted for tungsten sputtering by low-energy, 85–200 eV Ar atoms. The angular distributions of sputtered particles are measured. A new method for molecular dynamics simulation of sputtering taking into account random crystallographic surface orientation is developed, and applied for the case under consideration. The simulations approximate experimental results well. At low energies the distributions acquire “butterfly-like” shape with lower sputtering yields for close to normal angles comparing to the cosine distribution. The energy distributions of sputtered particles were simulated. The Thompson distribution remains valid down to near-threshold 85 eV case. |