Reiche, M., Moutanabir, O., Himcinschi, C., Christiansen, S., Erfurth, W., Gösele, U., . . . Petzold, M. (2008). Strained Silicon on Wafer Level by Wafer Bonding: Materials Processing, Strain Measurements and Strain Relaxation. Pennington, NJ: Electrochemical Society (ECS).
Chicago Style CitationReiche, M., et al. Strained Silicon On Wafer Level By Wafer Bonding: Materials Processing, Strain Measurements and Strain Relaxation. Pennington, NJ: Electrochemical Society (ECS), 2008.
MLA CitationReiche, M., et al. Strained Silicon On Wafer Level By Wafer Bonding: Materials Processing, Strain Measurements and Strain Relaxation. Pennington, NJ: Electrochemical Society (ECS), 2008.
Warning: These citations may not always be 100% accurate.