This title appears in the Scientific Report :
2021
Please use the identifier:
http://dx.doi.org/10.1002/pssr.202100027 in citations.
Please use the identifier: http://hdl.handle.net/2128/29831 in citations.
Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas
Chemical Stability of IrO 2 Top Electrodes in Ferroelectric Hf 0.5 Zr 0.5 O 2 ‐Based Metal–Insulator–Metal Structures: The Impact of Annealing Gas
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Personal Name(s): | Szyjka, Thomas |
---|---|
Baumgarten, Lutz / Mittmann, Terence / Matveyev, Yury / Schlueter, Christoph / Mikolajick, Thomas / Schroeder, Uwe / Müller, Martina (Corresponding author) | |
Contributing Institute: |
Elektronische Eigenschaften; PGI-6 |
Published in: | Physica status solidi / Rapid research letters, 15 (2021) 5, S. 2100027 - |
Imprint: |
Weinheim
Wiley-VCH
2021
|
DOI: |
10.1002/pssr.202100027 |
Document Type: |
Journal Article |
Research Program: |
Materials and Interfaces |
Link: |
OpenAccess |
Publikationsportal JuSER |
Please use the identifier: http://hdl.handle.net/2128/29831 in citations.
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