Subject
Monte Carlo method
1
ULSI (ultra large scale integration)
1
chemical vapor deposition
1
computer simulation
1
epitaxy
1
etching
1
evolution
1
fabrication
1
grain boundary
1
grain growth
1
growth
1
ion implantation
1
lithography
1
metallization
1
modeling
1
molecular dynamics
1
plasma etching
1
plasma processing
1
point defect
1
reliability
1
semiconducting film
1
simulation
1
sputtering
1
surface diffusion
1
texture
1
thin film
1
thin film technology
1