Subject
thin film technology
6
chemical vapor deposition
5
thin film
4
heterostructure
3
epitaxy
2
ferroelectric material
2
growth
2
molecular beam epitaxy
2
plasma etching
2
plasma processing
2
silicide
2
silicon
2
surface analysis
2
surface modification
2
vapor deposited coating
2
Josephson device
1
VLSI technology
1
adsorption
1
breakdown
1
crystal growth from vapor
1
crystal structure
1
film
1
hysteresis
1
ion beam
1
ion beam surface modification
1
ion beam technology
1
ion source
1
metal organic compound
1
microstructure
1
microtechnology
1
molecular beam
1
multilayer system
1
plasma deposition
1
plasma generation
1
polarization
1
semiconductor
1
spray coating
1
sputtering
1
stoichiometry
1
superconductor
1
superlattice
1
surface
1
surface reaction
1
thin film physics
1
vapor phase epitaxy
1