Subject
microfabrication (for microelectronics only)
microtechnology
5
sensor (technical and physical)
2
actuator
1
chemical vapor deposition
1
etching
1
genetic code
1
interface
1
lithography
1
microanalysis
1
microelectronics
1
microstructure
1
nanotechnology
1
neuron
1
sensor (biological)
1
sensor (chemical)
1
sequence analysis
1
shape memory effect
1
thin film technology
1