Subject
ion implantation
28
ion beam processing
7
ion beam surface modification
5
ion beam solid interaction
3
optical properties
3
semiconductor
3
channeling
2
cross section
2
insulator
2
ion irradiation
2
ion optics
2
magnetic properties
2
nanostructures
2
optical material
2
silicon
2
Auger electron spectroscopy
1
Raman spectroscopy
1
X-ray diffraction
1
amorphous semiconductor
1
annealing
1
carbon
1
characterization
1
chemical vapor deposition
1
composite materials
1
crystal doping
1
defect
1
depth profiling
1
diamond
1
ellipsometry
1
film deposition
1
fracture
1
glass
1
graphite
1
helium
1
helium embrittlement
1
implantation
1
industrial aspect
1
integrated optics
1
ion beam
1
ion beam analysis
1
ion beam technology
1
ion source
1
luminescence
1
materials characterization
1
metal surface
1
microstructure
1
nanostructured material
1
nickel
1
oxide
1
photoluminescence
1
more ...