Subject
chemical potential
6
entropy
2
equilibrium
2
thermochemistry
2
thermodynamics
2
Boltzmann equation
1
Hartree Fock method
1
Schroedinger equation
1
chemical vapor deposition
1
electronic structure
1
ideal gas
1
nonequilibrium phenomena
1
phase equilibrium
1
pressure
1
radiation
1
sputtering
1
temperature dependence
1
thin film technology
1