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Anders, Andre
FGKJ - Plasma processing, etching
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Anders, Andre
FGKJ - Plasma processing, etching
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1
Book
Handbook of plasma immersion ion implantation and deposition /
Anders, Andre
2000
Subject (ZB):
“
...
film
deposition...
”
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Handbook, Textbook
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ZB
1
Name
Anders, Andre
Subject
film deposition
1
industrial aspect
1
ion implantation
1
materials characterization
1
metal surface
1
plasma processing
1
Classification
FGGB - Ion implantation, ion beam synthesis
1
FGKJ - Plasma processing, etching
Language
English
1
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