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Defect and impurity engineered semiconductors and devices: Defect engineering in semiconductor growth, processing and device technology: symposium : MRS spring meeting 1995 : San-F...
Ashok, Sekhar
1995
Subject (ZB):
“
...
ion
implantation
...
”
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Ashok, Sekhar
Subject
activation
1
crystal
1
defect
1
device
1
gettering
1
hydrogen
1
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impurity
1
interaction
1
interface
1
ion implantation
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passivation
1
quantum well
1
semiconductor
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superlattice
1
thin film
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Classification
FJHE - Defects and radiation effects in semiconductors
1
Language
English
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