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Bernhardt, A. F.
FGJ - Laser and electron beam processing
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Bernhardt, A. F.
FGJ - Laser and electron beam processing
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1
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In situ patterning: selective area deposition and etching: symposium : Boston, MA, 29.11.89-01.12.89.
Bernhardt, A. F.
1990
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FGJ
-
Laser
and
electron
beam
processing
...
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Name
Bernhardt, A. F.
Subject
electron beam processing
1
etching
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ion beam processing
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laser processing
1
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FAF - Materials research - comprehensive works
1
FGJ - Laser and electron beam processing
FGKJ - Plasma processing, etching
1
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