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Francombe, M. H.
FGKJ - Plasma processing, etching
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Francombe, M. H.
FGKJ - Plasma processing, etching
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1
Book
Plasma sources for thin film deposition and etching.
Francombe, M. H.
1994
“
...
FFP
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Physics
of
thin
films
...
”
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Francombe, M. H.
Subject
plasma deposition
1
plasma etching
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thin film physics
1
thin film technology
1
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FFP - Physics of thin films
1
FGKJ - Plasma processing, etching
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