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Francombe, M. H.
ZB
thin film technology
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Francombe, M. H.
ZB
thin film technology
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1
Book
Plasma sources for thin film deposition and etching.
Francombe, M. H.
1994
“
...
FFP
-
Physics
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thin
films
...
”
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2
Book
Thin films for advanced electronic devices.
Francombe, M. H.
1991
“
...
FFP
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Physics
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thin
films
...
”
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ZB
Name
Francombe, M. H.
Subject
thin film physics
2
thin film technology
electronic device
1
plasma deposition
1
plasma etching
1
Classification
FFP - Physics of thin films
2
FGKJ - Plasma processing, etching
1
FJL - Physics of solid state devices
1
TBV - Electronic devices
1
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