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Franz, Gerhard.
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1
Book
Kalte Plasmen : Grundlagen, Erscheinungen, Anwendungen /
Franz, Gerhard.
1990
Subject (ZB):
“
...
sputter
deposition
...
”
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ZB
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Name
Franz, Gerhard.
Subject
plasma etching
1
plasma processing
1
sputter deposition
1
Classification
FGKJ - Plasma processing, etching
1
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