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Kawai, Yoshinobu
thin film technology
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Kawai, Yoshinobu
thin film technology
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Industrial plasma technology : applications from environmental to energy technologies /
Kawai,
Yoshinobu
2010
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...Kawai,
Yoshinobu
...
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Name
Kawai, Yoshinobu
Subject
biological aspect
1
cold plasma
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environmental impact
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flow distribution
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gas flow
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plasma
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solar cell
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thin film technology
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CLD - High temperature chemistry, plasma chemistry
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FGKJ - Plasma processing, etching
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PGA - Plasma physics
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