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Muray, Julius J.
microelectronics
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microtechnology
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Muray, Julius J.
microelectronics
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microtechnology
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The Physics of micro/nano-fabrication /
Brodie, Ivor.
1992
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Brodie, Ivor.
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Muray, Julius J.
Subject
ion beam processing
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lithography
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microelectronics
microfabrication (for microelectronics only)
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microtechnology
pattern formation
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FGM - Microelectronic technology
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