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FAF - Materials research - comprehensive works
AND
FGM - Microelectronic technology
Conference Publication
Book
semiconductor processing
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FAF - Materials research - comprehensive works
AND
FGM - Microelectronic technology
Conference Publication
Book
semiconductor processing
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1
Book
Surface chemical cleaning and passivation for semiconductor processing : symposium held April 13-15, 1993, San Francisco, California USA : [during the 1993 spring meeting] /
Higashi, Gregg S.
1993
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2
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Chemical surface preparation, passivation and cleaning for semiconductor growth and processing: symposium : San-Francisco, CA, 27.04.92-29.04.92.
Nemanich, R. J.
1992
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3
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III-V electronic and photonic device fabrication and performance: symposium: papers : San-Francisco, CA, 12.04.93-15.04.93.
Jones, K. S.
1993
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3
Material Type
Book
Type of Literature
Conference Publication
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ZB
3
Name
Higashi, Gregg S.
1
Jones, K. S.
1
Nemanich, R. J.
1
Subject
semiconductor processing
cleaning
2
passivation
2
semiconductor surface
2
III - V semiconductor
1
semiconductor device
1
Classification
FAF - Materials research - comprehensive works
FGM - Microelectronic technology
FJKC - III - V semiconductors
1
FJLB - Physics of semiconductor devices
1
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