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FAF - Materials research - comprehensive works
ZB
film deposition
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FAF - Materials research - comprehensive works
ZB
film deposition
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1
Book
Advanced III-V compound semiconductor growth, processing and devices: symposium: proceedings : Boston, MA, 02.12.91-05.12.91.
Pearton, S. J.
1992
“
...
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Thin
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,
epitaxy
...
”
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2
Book
Evolution of thin film and surface microstructure : Materials Research Society symposium on the evolution of thin film and surface microstructure: papers : Boston, MA, 26.11.90-01....
Thompson, C. V.
1991
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Thin
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,
epitaxy
...
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ZB
Name
Pearton, S. J.
1
Thompson, C. V.
1
Subject
film deposition
III - V semiconductor
1
epitaxy
1
microstructure
1
nucleation
1
semiconductor processing
1
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surface structure
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Classification
FAF - Materials research - comprehensive works
FGK - Thin film technology, epitaxy
2
FFJ - Surface structure, gas solid interface
1
FFP - Physics of thin films
1
FGCB - Nucleation, crystallization phenomena
1
FJKC - III - V semiconductors
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