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FANE - Computational solid state physics
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FANE - Computational solid state physics
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Sputtering by particle bombardment : experiments and computer calculations from threshold to MeV energies /
Behrisch, Rainer.
2007
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deposition
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Behrisch, Rainer.
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film deposition
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sputtering
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thin film technology
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FANE - Computational solid state physics
FGK - Thin film technology, epitaxy
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